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Inventors: Back S, Soyez G, Büchele J
Patent Title: Monitoring element for lithographic projection systems
Publication date: 2006
Publication number: WO/2006/029824

Abstract: A monitoring element for use in a lithographic projection system is provided, comprising a sensor element for detecting at least one chemical compound present in a fluid present in said projection system and a data collection element collecting data from said sensor element.
URL: http://v3.espacenet.com/textdoc?DB=EPODOC&IDX=WO2006029824&F=0

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